Gas Sensor - Revision history

Schuetz2 at 05:31, 17 June 2025

2025-06-17T05:31:52Z

← Older revision		Revision as of 05:31, 17 June 2025
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	title = {Gas Sensor},		title = {Gas Sensor},
	howpublished = {{MORwiki} -- Model Order Reduction Wiki},		howpublished = {{MORwiki} -- Model Order Reduction Wiki},
	url = <nowiki>{~~http~~://modelreduction.org/~~index.php~~/Gas_Sensor}</nowiki>,		url = <nowiki>{https://modelreduction.org/morwiki/Gas_Sensor}</nowiki>,
	year = {20XX}		year = {20XX}
	}		}

Malhotra: infobox string

2023-11-30T09:32:08Z

infobox string

@@ Line 5: / Line 5: @@
 [[Category:first differential order]]
 [[Category:time invariant]]
 ==Description: Microhotplate Gas Sensor==

Mitchell: wrong word

2022-03-15T10:06:23Z

wrong word

← Older revision		Revision as of 10:06, 15 March 2022
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	The goal of European project [https://web.archive.org/web/20050826075758/http://www.cnm.es:80/imb/glassgas/index.htm Glassgas] (IST-99-19003) was to develop a novel metal oxide low power '''microhotplate gas sensor''' <ref name="wollenstein03"/>.		The goal of European project [https://web.archive.org/web/20050826075758/http://www.cnm.es:80/imb/glassgas/index.htm Glassgas] (IST-99-19003) was to develop a novel metal oxide low power '''microhotplate gas sensor''' <ref name="wollenstein03"/>.
	In order to assure a robust design and good thermal isolation of the membrane from the surrounding wafer, the silicon microhotplate is supported by glass pillars emanating from a glass cap above the silicon wafer, as shown in Fig. 1.		In order to assure a robust design and good thermal isolation of the membrane from the surrounding wafer, the silicon microhotplate is supported by glass pillars emanating from a glass cap above the silicon wafer, as shown in Fig. 1.
	In ~~present~~ design, four different sensitive layers can be deposited on the membrane.		In this design, four different sensitive layers can be deposited on the membrane.
	The thermal management of a '''microhotplate gas sensor''' is of crucial importance.		The thermal management of a '''microhotplate gas sensor''' is of crucial importance.

Himpe: /* Citation */

2022-01-26T13:43:54Z

Citation

← Older revision		Revision as of 13:43, 26 January 2022
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	* For the background on the benchmark:		* For the background on the benchmark:

	@INPROCEEDINGS{~~BecHWetal95~~,		@INPROCEEDINGS{BecHWetal04,
	author = <nowiki>{T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink}</nowiki>,		author = <nowiki>{T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink}</nowiki>,
	title = {Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor},		title = {Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor},
	booktitle = {Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems},		booktitle = {Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems},
	pages = {263--267},		pages = {263--267},
	year = {~~1995~~},		year = {2004},
	doi = {10.1109/ESIME.2004.1304049}		doi = {10.1109/ESIME.2004.1304049}
	}		}

Saak: /* Data */

2021-12-14T08:56:45Z

Data

← Older revision		Revision as of 08:56, 14 December 2021
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	==Data==		==Data==

	Download matrices in the [http://math.nist.gov/MatrixMarket/ Matrix Market] format: [https://~~www~~.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-dim1e5-GasSensor.tar.gz GasSensor-dim1e5-GasSensor.tar.gz], (8 MB).		Download matrices in the [http://math.nist.gov/MatrixMarket/ Matrix Market] format: [https://csc.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-dim1e5-GasSensor.tar.gz GasSensor-dim1e5-GasSensor.tar.gz], (8 MB).

	The matrix name is used as an extension of the matrix file.		The matrix name is used as an extension of the matrix file.

Himpe: Fix CrossRefs

2021-08-27T07:36:07Z

Fix CrossRefs

← Older revision		Revision as of 07:36, 27 August 2021
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	The goal of European project [https://web.archive.org/web/20050826075758/http://www.cnm.es:80/imb/glassgas/index.htm Glassgas] (IST-99-19003) was to develop a novel metal oxide low power '''microhotplate gas sensor''' <ref name="wollenstein03"/>.		The goal of European project [https://web.archive.org/web/20050826075758/http://www.cnm.es:80/imb/glassgas/index.htm Glassgas] (IST-99-19003) was to develop a novel metal oxide low power '''microhotplate gas sensor''' <ref name="wollenstein03"/>.
	In order to assure a robust design and good thermal isolation of the membrane from the surrounding wafer, the silicon microhotplate is supported by glass pillars emanating from a glass cap above the silicon wafer, as shown in ~~<xr id="fig1"/>~~.		In order to assure a robust design and good thermal isolation of the membrane from the surrounding wafer, the silicon microhotplate is supported by glass pillars emanating from a glass cap above the silicon wafer, as shown in Fig. 1.
	In present design, four different sensitive layers can be deposited on the membrane.		In present design, four different sensitive layers can be deposited on the membrane.
	The thermal management of a '''microhotplate gas sensor''' is of crucial importance.		The thermal management of a '''microhotplate gas sensor''' is of crucial importance.
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	The output nodes are described in Table 1.		The output nodes are described in Table 1.
	In ~~<xr id="fig2"/>~~ the red marked nodes are positioned on the silicon rim.		In Fig. 2 the red marked nodes are positioned on the silicon rim.
	Their temperature should be close to the initial temperature in the case of good thermal decoupling between the membrane and the silicon rim.		Their temperature should be close to the initial temperature in the case of good thermal decoupling between the membrane and the silicon rim.
	The black marked nodes are placed on the sensitive layers above the heater and are numbered from left to right row by row, as schematically shown in Fig 2.		The black marked nodes are placed on the sensitive layers above the heater and are numbered from left to right row by row, as schematically shown in Fig 2.

Himpe: verified gas sensor

2018-07-25T07:57:05Z

verified gas sensor

← Older revision		Revision as of 07:57, 25 July 2018
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	~~{{preliminary}} <!-- Do not remove -->~~

	[[Category:benchmark]]		[[Category:benchmark]]
	[[Category:Oberwolfach]]		[[Category:Oberwolfach]]
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	{\| class="wikitable" style="margin: auto;"		{\| class="wikitable" style="margin: auto;"
	\|+ style="caption-side:bottom;"\|''Table 1: ~~Outputs~~ for the gas sensor model.''		\|+ style="caption-side:bottom;"\|''Table 1: Inputs and outputs for the gas sensor model.''
	\|-		\|-
	\|Number		\|Number
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	The benchmark contains a constant load vector.		The benchmark contains a constant load vector.
	The input function equal to <math>1</math> corresponds to the constant input power of <math>340 mW</math>.		The input function equal to <math>u(t) = 1</math> corresponds to the constant input power of <math>340 mW</math>.
	One can insert a weak input nonlinearity related to the dependence of heater's resistivity on temperature given as:		One can insert a weak input nonlinearity related to the dependence of heater's resistivity on temperature given as:

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	</math>		</math>

	where <math>\alpha =1.~~469e~~-3 K^-1</math>.		where <math>\alpha =1.469 \cdot 10^{-3} K^{-1}</math>.
	To this end, one has to multiply the load vector by a function:		To this end, one has to multiply the load vector by a function:

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	where <math>U</math> is a desired constant voltage.		where <math>U</math> is a desired constant voltage.
	The temperature in equation above should be replaced by the temperature at the ~~output <math>~~1~~</math>~~.		The temperature in the equation above should be replaced by the temperature at the input 1 (aHeater).

	The linear ordinary differential equations of the first order are written as:		The linear ordinary differential equations of the first order are written as:
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	<math>B \in \mathbb{R}^{66917 \times 1}</math>,		<math>B \in \mathbb{R}^{66917 \times 1}</math>,
	<math>C \in \mathbb{R}^{1 \times 66917}</math>.		<math>C \in \mathbb{R}^{1 \times 66917}</math>.

			==Citation==

			To cite this benchmark, use the following references:

			* For the benchmark itself and its data:
			::The MORwiki Community, '''Gas Sensor'''. MORwiki - Model Order Reduction Wiki, 2018. http://modelreduction.org/index.php/Gas_Sensor

			@MISC{morwiki_gas,
			author = <nowiki>{{The MORwiki Community}}</nowiki>,
			title = {Gas Sensor},
			howpublished = {{MORwiki} -- Model Order Reduction Wiki},
			url = <nowiki>{http://modelreduction.org/index.php/Gas_Sensor}</nowiki>,
			year = {20XX}
			}

			* For the background on the benchmark:

			@INPROCEEDINGS{BecHWetal95,
			author = <nowiki>{T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink}</nowiki>,
			title = {Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor},
			booktitle = {Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems},
			pages = {263--267},
			year = {1995},
			doi = {10.1109/ESIME.2004.1304049}
			}

	==References==		==References==
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	<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>		<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>

	<ref name="bechthold05">T. Bechtold, "<span class="plainlinks">[~~http~~://www.freidok.uni-freiburg.de/volltexte/1914/ Model Order Reduction of Electro-Thermal MEMS]</span>", PhD thesis, Department of Microsystems Engineering, University of Freiburg, 2005.</ref>		<ref name="bechthold05">T. Bechtold, "<span class="plainlinks">[https://www.freidok.uni-freiburg.de/volltexte/1914/ Model Order Reduction of Electro-Thermal MEMS]</span>", PhD thesis, Department of Microsystems Engineering, University of Freiburg, 2005.</ref>

	</references>		</references>

Himpe: /* References */

2018-07-17T10:27:07Z

References

← Older revision		Revision as of 10:27, 17 July 2018
Line 134:		Line 134:
	<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>		<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>

	<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://www.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-~~Hildenbrand05~~.pdf Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>		<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://www.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-Hildenbrand03.pdf Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>

	<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>		<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>

Himpe: /* References */ link fix

2018-07-17T10:26:44Z

References: link fix

← Older revision		Revision as of 10:26, 17 July 2018
Line 134:		Line 134:
	<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>		<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>

	<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://www.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-~~dim1e5-GasSensor~~.~~tar.gz~~ Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>		<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://www.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-Hildenbrand05.pdf Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>

	<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>		<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>

Himpe: /* References */ Update thesis location

2018-07-17T10:26:08Z

References: Update thesis location

← Older revision		Revision as of 10:26, 17 July 2018
Line 134:		Line 134:
	<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>		<ref name="wollenstein03">J. Wöllenstein, H. Böttner, J.A. Pláza, C. Carné, Y. Min, H.L. Tuller, <span class="plainlinks">[https://doi.org/10.1016/S0925-4005(03)00218-1 A novel single chip thin film metal oxide array]</span>, Sensors and Actuators B: Chemical 93 (1-3): 350--355, 2003.</ref>

	<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://~~simulation~~.~~uni~~-~~freiburg~~.de/~~downloads/benchmark~~/~~Gas%20sensor%20%2838880%29~~/~~files~~/~~fileinnercontentproxy.2010~~-02-09.~~2495792969~~ Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>		<ref name="hildenbrand03">J. Hildenbrand, <span class="plainlinks">[https://www.mpi-magdeburg.mpg.de/mpcsc/MORWIKI/Oberwolfach/GasSensor-dim1e5-GasSensor.tar.gz Simulation and Characterisation of a Gas sensor and Preparation for Model Order Reduction]</span>, Diploma Thesis, University of Freiburg, Germany, 2003.</ref>

	<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>		<ref name="bechthold04">T. Bechtold, J. Hildenbrand, J. Wöllenstein, J. G. Korvink, <span class="plainlinks">[https://doi.org/10.1109/ESIME.2004.1304049 Model Order Reduction of 3D Electro-Thermal Model for a Novel, Micromachined Hotplate Gas Sensor]</span>, Proceedings of 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EUROSIME2004, May 10-12, 2004, Brussels, Belgium: 263--267, 2004.</ref>